Cooling structure for ultraprecise linear motor
CN102882314APatent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- HARBIN INST OF TECH
- Publication Date
- 2013-01-16
Abstract
Description
technical field
[0001] The invention relates to a cooling structure of an ultra-precision linear motor, belonging to the technical field of linear motors. Background technique
[0002] The ultra-precision linear motor is the actuator that guarantees the operation of the ultra-precision servo system. With the development of nanotechnology and biotechnology, the requirements for thrust density and thrust accuracy of ultra-precision linear motors are gradually increasing, which leads to an increase in the current density of the motor windings, and the copper loss increases accordingly. Since the current ultra-precision position servo system uses a laser displacement sensor, it has high requirements on the constant temperature of the ambient temperature, and the ultra-precision servo system has a high integration density. During operation, the ultra-precision linear motor used is difficult. Avoid heat dissipation to the outside world, and the ultra-precise position servo system...